Lithium Doping Effect on Microstructural and Electrical Properties of ZnO Thin Films Grown by Metal Organic Chemical Vapor Deposition Muhammad Arief Mustajab (a*), Toto Winata (a), Pepen Arifin (a), Suprijadi (b)
a) Physics of Electronic Materials Research Group, Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesha 10, Bandung 40132, Indonesia
*arief[at]fi.itb.ac.id
b) Instrumentation and Computation Research Group, Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesha 10, Bandung 40132, Indonesia
Abstract
The undoped and Li-doped ZnO thin films were grown on Si(100) substrate using metal organic chemical vapor deposition (MOCVD). Zinc acetylacetonate hydrate and lithium acetylacetonate solution were used as ZnO thin film precursor and Li dopant source respectively. Lithium incorporation into ZnO thin films were confirmed using energy dispersive X-ray spectroscopy (EDX). The effect of lithium doping on microstructural were characterized using scanning electron microscope (SEM) and X-ray diffractometer (XRD). XRD diffractogram analysis shows that undoped and Li-doped ZnO thin films have polycrystalline hexagonal wurtzite structure having preferred peak crystal orientation of (002). Li doping decrease the lattice parameters and cell volume of ZnO thin films. From SEM observation, surface morphology of ZnO thin films slightly affected by Li doping. Current-voltage (I-V) measurement and four-point probe method were used to measure electrical properties of lithium doped ZnO thin films. Electrical conductivity of ZnO thin films increase as Li doping given.
Keywords: Li doped ZnO- Zinc acetylacetonate- Lithium acetylacetonate- MOCVD
